What This Covers: The Extended Phase Shifting Interferometry (EPSI) also known as CSI optimized for smooth surfaces, achieves 0.1 nm of ... The Coherence Scanning Interferometry (CSI) uses white light to scan the surface height of smooth to moderately rough surfaces, ...
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The Extended Phase Shifting Interferometry (EPSI) also known as CSI optimized for smooth surfaces, achieves 0.1 nm of ... Phase Shift Interferometry measures the surface height of very smooth and continuous surfaces with a sub-Angstrom ...
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The Coherence Scanning Interferometry (CSI) uses white light to scan the surface height of smooth to moderately rough surfaces, ...
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- The Coherence Scanning Interferometry (CSI) uses white light to scan the surface height of smooth to moderately rough surfaces, ...
- Phase Shift Interferometry measures the surface height of very smooth and continuous surfaces with a sub-Angstrom ...
- The Extended Phase Shifting Interferometry (EPSI) also known as CSI optimized for smooth surfaces, achieves 0.1 nm of ...
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